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This paper presents a pioneering smart magnetic force sensor that combines a single-crystal diamond (SCD) MEMS resonator with a permanent magnetic particle through magnetic field gradient effect, enabling detection of ultraweak magnetic forces down to the femtonewton (fN) range. The sensor exhibits exceptional sensitivity of 7.15×103 ppm/(mT/mm) and low frequency fluctuation of 8.95×10-5 Hz, along with a rapid response time of 12.5 ms, making it suitable for high-precision measurements. Its design and functionality make it well-suited for diverse applications, from ultra-sensitive magnetic detection to innovative applications in miniaturized sensing systems.

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  © 2025 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

Keyword: Diamond, MEMS, magnetic sensors

Date published: 2025-01-19

Publisher: IEEE

Journal:

• 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) (ISSN: 21601968) p. 971-974

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Funding:

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.5904

First published URL: https://doi.org/10.1109/mems61431.2025.10917760

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Updated at: 2025-11-13 16:30:04 +0900

Published on MDR: 2025-11-13 16:24:29 +0900