Calculations of Electron Inelastic Mean Free Paths in Solids over the 10 eV to 200 keV Energy Range with the Relativistic Full Penn Algorithm

Shinotsuka, H; TANUMA, Shigeo; Powell, C. J.; Penn, D. R.

Presentation Calculations of Electron Inelastic Mean Free Paths in Solids over the 10 eV to 200 keV Energy Range with the Relativistic Full Penn Algorithm

Shinotsuka, H (物質・材料研究機構) ; TANUMA, Shigeo (Research Network and Facility Services Division/Materials Analysis Station, National Institute for Materials Science) ; Powell, C. J. (NIST) ; Penn, D. R. (NIST)

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Shinotsuka, H, TANUMA, Shigeo, Powell, C. J., Penn, D. R.. Calculations of Electron Inelastic Mean Free Paths in Solids over the 10 eV to 200 keV Energy Range with the Relativistic Full Penn Algorithm. https://doi.org/10.48505/nims.4204

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We have calculated IMFPs for 41 elemental solids and 30 semiconductors at equal energy intervals on a logarithmic scale corresponding to increments of 10% from 10 eV to 200 keV. These calculations were made with optical ELFs using the relativistic full Penn algorithm. Our calculated IMFPs could be fitted to a modified relativistic Bethe equation for inelastic scattering of electron in matter for energies from 50 eV to 200 keV. The RMS deviation in these fits was 0.8% for the 41 elemental solids. The new IMFPs were also compared with IMFPs from the predictive TPP-2M equation that was modified to include relativistic effects; the average RMS deviation in these comparisons was 11.9% for the 41 elemental solids and for energies from 50 eV to 200 keV.

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