Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution in Mg Ion‐Implanted GaN

Emi Kano; Jun Uzuhashi; Koki Kobayashi; Kosuke Ishikawa; Kyosuke Sawabe; Tetsuo Narita; Kacper Sierakowski; Michal Bockowski; Tadakatsu Ohkubo; Tetsu Kachi; Nobuyuki Ikarashi

doi:10.1002/pssr.202400074

Journal article Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution in Mg Ion‐Implanted GaN

;

; ; ; ; ; ; ;

; ;

Physica Rapid Research Ltrs - 2024 - Kano - Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution.pdf

Download file (926 KB)
Download as zip (775 KB)

Collection

Citation

Emi Kano, Jun Uzuhashi, Koki Kobayashi, Kosuke Ishikawa, Kyosuke Sawabe, Tetsuo Narita, Kacper Sierakowski, Michal Bockowski, Tadakatsu Ohkubo, Tetsu Kachi, Nobuyuki Ikarashi. Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution in Mg Ion‐Implanted GaN. physica status solidi (RRL) – Rapid Research Letters. 2024, 18 (9), 2400074. https://doi.org/10.1002/pssr.202400074

(BibTeX)

Description:

(abstract)

In Mg ion implantation doping of GaN, sequential N ion implantation reportedly changes Mg concentrations in the Mg ion-implanted region and the underlying region after activation annealing. Our atomic-resolution analyses showed that, in the Mg ion-implanted region, the N ion implantation increases the concentration of MgGa. The rest of the Mg atoms agglomerated to form clusters on the extended defects, and its concentration was also increased by the N implantation. The N implantation affected the coarsening of the defects, which cause Mg cluster formation.

Rights:

Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International

Keyword: gallium nitride, atom probe tomography, transmission electron microscopy

Date published: 2024-04-22

Publisher: Wiley

Journal:

physica status solidi (RRL) – Rapid Research Letters (ISSN: 18626254) vol. 18 issue. 9 2400074

Funding:

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1002/pssr.202400074

Related item:

Other identifier(s):

Contact agent:

Updated at: 2024-09-20 16:30:27 +0900

Published on MDR: 2024-09-20 16:30:27 +0900

Filename	Size
Filename	Physica Rapid Research Ltrs - 2024 - Kano - Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution.pdf (Thumbnail) application/pdf	Size	926 KB	Detail