@misc{emi2024a,
  title = {Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution in Mg Ion‐Implanted GaN},
  author = {Emi Kano, Jun Uzuhashi, Koki Kobayashi, Kosuke Ishikawa, Kyosuke Sawabe, Tetsuo Narita, Kacper Sierakowski, Michal Bockowski, Tadakatsu Ohkubo, Tetsu Kachi, Nobuyuki Ikarashi},
  publisher = {Wiley},
  year = {2024-04-22},
  keywords = {gallium nitride, atom probe tomography, transmission electron microscopy}
}