Article Uncertainty evaluation of Monte Carlo simulated line scan profiles of a critical dimension scanning electron microscope (CD-SEM)

M. S. S. Khan ; S. F. Mao ; Y. B. Zou ; Y. G. Li ; B. Da SAMURAI ORCID (National Institute for Materials ScienceROR) ; Z. J. Ding

shrine20241107-1698-49oa22.pdf
Download file (4.03 MB)
Download as zip (3.07 MB)
Collection

Citation
M. S. S. Khan, S. F. Mao, Y. B. Zou, Y. G. Li, B. Da, Z. J. Ding. Uncertainty evaluation of Monte Carlo simulated line scan profiles of a critical dimension scanning electron microscope (CD-SEM). Journal of Applied Physics. 2023, 133 (24), 245303. https://doi.org/10.1063/5.0153379
SAMURAI

Description:

(abstract)

In recent years, precision and accuracy for a more precise critical dimension (CD) control have been required in CD measurement technology. CD distortion between the measurement by a critical dimension scanning electron microscope (CD-SEM) and a reference tool is the most important factor for a more accurate CD measurement. CD bias varies by a CD-SEM and a pattern condition. Therefore, it is urgently needed to identify, characterize, and quantify those parameters that may or may not affect the CD measurement by a CD-SEM. The sensitivity of the Monte Carlo simulated CD-SEM images with multiple physical modeling components has been studied previously. In this study, we demonstrate that the work function and elastic scattering potential models have a significant impact on secondary electron emission intensity, but their influence on the shape of the linescan profile is small, and other factors like the optical energy loss function and dielectric function models have even smaller effects.

Rights:

  • In Copyright

    Published under an exclusive license by AIP Publishing

Keyword: Monte Carlo

Date published: 2023-06-28

Publisher: AIP Publishing

Journal:

  • Journal of Applied Physics (ISSN: 00218979) vol. 133 issue. 24 245303

Funding:

  • National MCF Energy R&D Program of China 2019YFE03080500
  • Collaborative Innovation Program of Hefei Science Centre, CAS 2022HSC-CIP010
  • Natural Science Foundation of Xinjinag Uygur Autonomous Region 2022D01A223
  • National Natural Science Foundation of China 11975018
  • National Magnetic Confinement Fusion Energy Research Project 2018YFE0308100
  • Youth Innovation Promotion Association of CAS Y202087
  • National Institiute for Materials Science under the Support system for curiosity-driven research, JSPS KAKENHI JP21K14656
  • Chinese Education Ministry Through "111 Project 2.0" BP0719016
  • Kurata Grants from The Hitachi Global Foundation and by the Iketani Science & Technology Foundation N/A
  • Iketani Science & Technology Foundation N/A

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1063/5.0153379

Related item:

Other identifier(s):

Contact agent:

Updated at: 2024-11-07 16:30:44 +0900

Published on MDR: 2024-11-07 16:30:44 +0900

Filename Size
Filename shrine20241107-1698-49oa22.pdf (Thumbnail)
application/pdf 		Size 4.03 MB Detail