@misc{m2023a,
  title = {Uncertainty evaluation of Monte Carlo simulated line scan profiles of a critical dimension scanning electron microscope (CD-SEM)},
  author = {M. S. S. Khan, S. F. Mao, Y. B. Zou, Y. G. Li, B. Da, Z. J. Ding},
  publisher = {AIP Publishing},
  year = {2023-06-28},
  keywords = {Monte Carlo}
}