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MANA E-BULLETIN

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説明:

Facilities for lithography and nanofabrication were established at NIMS in 2004 under the leadership of Masakazu Aono, the Director the International Center for Materials Nanoarchitectonics (WPI-MANA) at NIMS from 2007 to 2017. The facilities became a part of WPI-MANA in 2009 and are now referred to as the Namiki Foundry. “Researchers at NIMS and WPI-MANA are experts in materials science but few have experience of lithography and device fabrication,” says Toshihide Nabatame, Manager of the Namiki Foundry (former MANA Foundry). “So our role is to work with scientists in supporting their research on device fabrication.”
The Namiki Foundry has eight cleanroom areas in its 235m2 floor space. The areas are drawing and photo lithography; wet process; etching; film deposition; nano measurement; nano analysis; heat treatment and dicing and wiring . The Namiki Foundry staff prepare samples for structural observation by SEM, produce devices by electron beam lithography for nano-gap electrode patterning for complicated structures such as nano wires and nano sheets. Notably, they handle any kind of material including organic, inorganic, metals, insulators, magnetic, superconductors and composites.

権利情報:

• In Copyright
  In Copyright

キーワード: Namiki Foundry, Lithography, Nanofabrication, Characterization, Film Deposition

刊行年月日: 2019-03-21

出版者: National Institute for Materials Science

掲載誌:

• MANA E-BULLETIN vol. 6

研究助成金:

原稿種別: 出版者版 (Version of record)

MDR DOI: https://doi.org/10.48505/nims.3826

公開URL: https://www.nims.go.jp/mana/ebulletin/feature.html

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更新時刻: 2023-12-25 00:30:34 +0900

MDRでの公開時刻: 2023-01-05 11:00:15 +0900