@misc{international2019a, title = {[MANA E-BULLETIN Vol.6 - Feature] Advanced nano-fabrication technology catalyzing discovery and innovation at MANA}, author = {International Center for Materials Nanoarchitectonics (WPI-MANA)}, publisher = {National Institute for Materials Science}, year = {2019-03-21}, keywords = {Namiki Foundry, Lithography, Nanofabrication, Characterization, Film Deposition} }