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We present new calculations of electron inelastic mean free paths (IMFPs) for 200-2000 eV electrons in 27 elements (C, Mg, Al, Si, Ti, V, Cr, Fe, Ni, Cu, Y, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Os, Ir, Pt, Au and Bi) and four compounds (LiF, SiO2, ZnS and Al2O3). These calculations are based on an algorithm due to Penn which makes use of experimental optical data (to represent the dependence of the inelastic scattering probability on energy loss) and the theoretical Lindhard dielectric function (to represent the dependence of the scattering probability on momentum transfer). Our calculated IMFPs were fitted to the Bethe equation for inelastic electron scattering in matter; the two parameters in the Bethe equation were then empirically related to several material constants. The resulting general IMFP formula is believed to be useful for predicting the IMFP dependence on electron energy for a given material and the material dependence for a given energy. The new formula also appears to be a reasonable but more approximate guide to electron attenuation lengths.

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• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

  This is the peer reviewed version of the following article: Calculations of electron inelastic mean free paths for 31 materials, which has been published in final form at https://doi.org/10.1002/sia.740111107. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions. This article may not be enhanced, enriched or otherwise transformed into a derivative work, without express permission from Wiley or by statutory rights under applicable legislation. Copyright notices must not be removed, obscured or modified. The article must be linked to Wiley’s version of record on Wiley Online Library and any embedding, framing or otherwise making available the article or pages thereof by third parties from platforms, services and websites other than Wiley Online Library must be prohibited.

Keyword: IMFP, inelastic mean free path, Bethe equation, TPP, elemental solids

Date published: 2004-09-15

Publisher: Wiley

Journal:

• Surface and Interface Analysis (ISSN: 10969918) vol. 11 issue. 11 p. 577-589

Funding:

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4168

First published URL: https://doi.org/10.1002/sia.740111107

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Contact agent: 田沼繁夫 (技術開発・共用部門, National Institute for Materials Science) tanuma.shigeo@nims.go.jp

Updated at: 2023-06-09 15:50:37 +0900

Published on MDR: 2023-06-05 11:13:04 +0900