論文 Calculations of Electron Inelastic Mean Free Paths for 31 Materials

Tanuma, S. SAMURAI ORCID (National Bureau of Standards) ; Powell, C. J. (National Bureau of Standards) ; Penn, D. R. (National Bureau of Standards)

コレクション

引用
Tanuma, S., Powell, C. J., Penn, D. R.. Calculations of Electron Inelastic Mean Free Paths for 31 Materials. Surface and Interface Analysis. 2004, 11 (11), 577-589. https://doi.org/10.1002/sia.740111107

説明:

(abstract)

We present new calculations of electron inelastic mean free paths (IMFPs) for 200-2000 eV electrons in 27 elements (C, Mg, Al, Si, Ti, V, Cr, Fe, Ni, Cu, Y, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Os, Ir, Pt, Au and Bi) and four compounds (LiF, SiO2, ZnS and Al2O3). These calculations are based on an algorithm due to Penn which makes use of experimental optical data (to represent the dependence of the inelastic scattering probability on energy loss) and the theoretical Lindhard dielectric function (to represent the dependence of the scattering probability on momentum transfer). Our calculated IMFPs were fitted to the Bethe equation for inelastic electron scattering in matter; the two parameters in the Bethe equation were then empirically related to several material constants. The resulting general IMFP formula is believed to be useful for predicting the IMFP dependence on electron energy for a given material and the material dependence for a given energy. The new formula also appears to be a reasonable but more approximate guide to electron attenuation lengths.

権利情報:

  • Creative Commons BY-NC Attribution-NonCommercial 4.0 International Creative Commons BY-NC Attribution-NonCommercial 4.0 International

    This is the peer reviewed version of the following article: Calculations of electron inelastic mean free paths for 31 materials, which has been published in final form at https://doi.org/10.1002/sia.740111107. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions. This article may not be enhanced, enriched or otherwise transformed into a derivative work, without express permission from Wiley or by statutory rights under applicable legislation. Copyright notices must not be removed, obscured or modified. The article must be linked to Wiley’s version of record on Wiley Online Library and any embedding, framing or otherwise making available the article or pages thereof by third parties from platforms, services and websites other than Wiley Online Library must be prohibited.

キーワード: IMFP, inelastic mean free path, Bethe equation, TPP, elemental solids

刊行年月日: 2004-09-15

出版者: Wiley

掲載誌:

  • Surface and Interface Analysis (ISSN: 10969918) vol. 11 issue. 11 p. 577-589

研究助成金:

原稿種別: 著者最終稿 (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4168

公開URL: https://doi.org/10.1002/sia.740111107

関連資料:

その他の識別子:

連絡先: 田沼繁夫 (技術開発・共用部門, National Institute for Materials Science) tanuma.shigeo@nims.go.jp

更新時刻: 2023-06-09 15:50:37 +0900

MDRでの公開時刻: 2023-06-05 11:13:04 +0900

Custom property / 独自項目

Information : Added corrected file as "_rev" due to an error in the formula. (ID: )

ファイル名 サイズ
ファイル名 IMFP I_AuthorManuscript.pdf (サムネイル)
application/pdf
サイズ 2.74MB 詳細
ファイル名 IMFP_I_AuthorManuscript_rev.pdf
application/pdf
サイズ 2.74MB 詳細