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Description:

Developing magnetic force sensors with a simple structure, high sensitivity, and exceptional reliability at room temperature remains challenging due to frequency fluctuations and noise suppression issues. In this work, an ultra-sensitive and highly reliable magnetic force sensor is presented by integrating a single-crystal diamond (SCD) MEMS resonator with a permanent magnetic particle. The magnetic particle serves as the sensing element, enabling precise detection of magnetic field gradients under a field bath. The SCD-based MEMS sensor exhibits outstanding performance, achieving an ultra-low detectable force of 1.8 × 10−16 N/Hz1/2, a high magnetic sensitivity of 0.303%/(mT/mm), and a response time of 98.8 ms in the first mode at room temperature. Notably, the resonant frequency fluctuation is remarkably low, reaching 7.89 × 10−4 Hz at room temperature, ensuring stable and reliable operation. Furthermore, a 3D magnetic force imaging sensor based on the SCD platform, capable of visualizing the 3D distribution of magnetic forces is demonstrated. This work lays a solid foundation for the advancement of SCD MEMS-based magnetic imaging sensors, offering unparalleled sensitivity, reliability, and tunable spatial resolution for next-generation magnetic imaging applications.

Rights:

• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

Keyword: Diamond, MEMS, magnetic sensors,

Date published: 2025-05-12

Publisher: Wiley

Journal:

• ADVANCED MATERIALS TECHNOLOGIES (ISSN: 2365709X)

Funding:

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1002/admt.202500470

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Updated at: 2025-07-22 12:30:24 +0900

Published on MDR: 2025-07-22 12:19:05 +0900