@misc{zilong2025a,
  title = {Ultrasensitive and Reliable Diamond MEMS Magnetic Force Sensor with 3D Imaging at Room Temperature},
  author = {Zilong Zhang, Keyun Gu, Zhijian Zhao, Zhengyan Lei, Yi-Hsiu Kao, Meiyong Liao, Takahito Ono, Masaya Toda},
  publisher = {Wiley},
  year = {2025-05-12},
  keywords = {Diamond, MEMS, magnetic sensors, }
}