Yuichi Oshima
(National Institute for Materials Science)
;
Elaheh Ahmadi
Description:
(abstract)パワー、およびUV応用を指向したα型酸化ガリウムの関連技術の現状と技術課題を俯瞰し、今後の展望を述べる。
Rights:
This content may be downloaded for personal use only. Any other use requires prior permission of the author and the publisher. This material originally appeared in Yuichi Oshima et al., Appl. Phys. Lett. 121, 260501 (2022) and may be found at https://doi.org/10.1063/5.0126698.
Keyword: α-Ga2O3, epitaxy, power device
Date published: 2022-12-26
Publisher: AIP Publishing
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Manuscript type: Publisher's version (Version of record)
MDR DOI:
First published URL: https://doi.org/10.1063/5.0126698
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Updated at: 2024-01-29 15:45:56 +0900
Published on MDR: 2024-01-30 08:30:10 +0900
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