High-throughput dry transfer and excitonic properties of twisted bilayers based on CVD-grown transition metal dichalcogenides

Hibiki Naito; Yasuyuki Makino; Wenjin Zhang; Tomoya Ogawa; Takahiko Endo; Takumi Sannomiya; Masahiko Kaneda; Kazuki Hashimoto; Hong En Lim; Yusuke Nakanishi; Kenji Watanabe; Takashi Taniguchi; Kazunari Matsuda; Yasumitsu Miyata

doi:10.1039/d3na00371j

論文 High-throughput dry transfer and excitonic properties of twisted bilayers based on CVD-grown transition metal dichalcogenides

Hibiki Naito ; Yasuyuki Makino ; Wenjin Zhang ; Tomoya Ogawa ; Takahiko Endo ; Takumi Sannomiya ; Masahiko Kaneda ; Kazuki Hashimoto ; Hong En Lim ; Yusuke Nakanishi ; Kenji Watanabe (National Institute for Materials Science) ; Takashi Taniguchi (National Institute for Materials Science) ; Kazunari Matsuda ; Yasumitsu Miyata

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Hibiki Naito, Yasuyuki Makino, Wenjin Zhang, Tomoya Ogawa, Takahiko Endo, Takumi Sannomiya, Masahiko Kaneda, Kazuki Hashimoto, Hong En Lim, Yusuke Nakanishi, Kenji Watanabe, Takashi Taniguchi, Kazunari Matsuda, Yasumitsu Miyata. High-throughput dry transfer and excitonic properties of twisted bilayers based on CVD-grown transition metal dichalcogenides. Nanoscale Advances. 2023, 5 (18), 5115-5121. https://doi.org/10.1039/d3na00371j

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(abstract)

Van der Waals (vdW) layered materials have attracted much attention because their physical properties can be controlled by varying the twist angle and layer composition. However, such twisted multilayers are often prepared using mechanically- exfoliated monolayer flakes with unintended shapes through a time-consuming search for such materials. Here, we report the rapid and all-dry fabrication of twisted multilayers using chemical vapor deposition (CVD) grown transition metal chalcogenide (TMDC) monolayers. The present dry transfer process demonstrates the one-step fabrication of more than 100 twisted bilayers and the sequential stacking of a twisted 10-layer MoS2 single crystal. Furthermore, we also fabricated the hBN-encapsulated TMDC monolayers and various twisted bilayers including MoSe2/MoS2, MoSe2/WSe2, and MoSe2/WS2. The interlayer interaction and quality of dry-transferred, CVD-grown TMDCs were characterized by using photoluminescence (PL), cathodoluminescence (CL) spectroscopy, and cross sectional electron microscopy. The prominent PL peaks of interlayer excitons can be observed for the MoSe2/MoS2 and MoSe2/WSe2 with small twist angles at room temperature. We also found that the optical spectra were locally modualted due to the nanosized bubbles, which are formed by the presence of interface carbon impurities. The present findings provide a widely applicable potential of the present method and enable an efficient search of the emergent optical and electrical properties of TMDC-based vdW heterostructures.

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