Download file (845 KB)
Download as zip (647 KB)

Collection

Citation

Description:

Van der Waals (vdW) layered materials have attracted much attention because their physical properties can be controlled by varying the twist angle and layer composition. However, such twisted multilayers are often prepared using mechanically- exfoliated monolayer flakes with unintended shapes through a time-consuming search for such materials. Here, we report the rapid and all-dry fabrication of twisted multilayers using chemical vapor deposition (CVD) grown transition metal chalcogenide (TMDC) monolayers. The present dry transfer process demonstrates the one-step fabrication of more than 100 twisted bilayers and the sequential stacking of a twisted 10-layer MoS2 single crystal. Furthermore, we also fabricated the hBN-encapsulated TMDC monolayers and various twisted bilayers including MoSe2/MoS2, MoSe2/WSe2, and MoSe2/WS2. The interlayer interaction and quality of dry-transferred, CVD-grown TMDCs were characterized by using photoluminescence (PL), cathodoluminescence (CL) spectroscopy, and cross sectional electron microscopy. The prominent PL peaks of interlayer excitons can be observed for the MoSe2/MoS2 and MoSe2/WSe2 with small twist angles at room temperature. We also found that the optical spectra were locally modualted due to the nanosized bubbles, which are formed by the presence of interface carbon impurities. The present findings provide a widely applicable potential of the present method and enable an efficient search of the emergent optical and electrical properties of TMDC-based vdW heterostructures.

Rights:

• cc-by-3.0
  

Keyword: van der Waals layered materials, chemical vapor deposition, twisted multilayers

Date published: 2023-09-04

Publisher: Royal Society of Chemistry (RSC)

Journal:

• Nanoscale Advances (ISSN: 25160230) vol. 5 issue. 18 p. 5115-5121

Funding:

• Japan Science and Technology Agency JPMJFR213J
• Japan Science and Technology Agency JPMJFR213X
• Japan Society for the Promotion of Science JP19K22142
• Japan Society for the Promotion of Science JP20H00354
• Japan Society for the Promotion of Science JP20H05664
• Japan Society for the Promotion of Science JP21H05232
• Japan Society for the Promotion of Science JP21H05233
• Japan Society for the Promotion of Science JP21H05234
• Japan Society for the Promotion of Science JP21H05235
• Japan Society for the Promotion of Science JP22H00280
• Japan Society for the Promotion of Science JP22H00283
• Japan Society for the Promotion of Science JP22H04957
• Japan Society for the Promotion of Science JP22K18986
• Japan Society for the Promotion of Science JP22KJ2561
• Japan Society for the Promotion of Science JP23H02052
• Japan Society for the Promotion of Science JP23K13635
• Japan Society for the Promotion of Science JP23K04530
• Kyoto University ZE2023B-05
• Murata Science Foundation

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1039/d3na00371j

Related item:

Other identifier(s):

Contact agent:

Updated at: 2025-02-15 12:30:41 +0900

Published on MDR: 2025-02-15 12:30:41 +0900