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In nanomechanical sensing, the interfacial structure between a receptor layer and an underlying substrate affects output signals, especially in the case of a partial attachment at the interface. Here, we present numerical simulations of the interfacial structures for the static deflection of a nanomechanical cantilever sensor by finite element analysis. A wide range of physical and structural parameters of receptor layers as well as interfacial structures are analyzed, while taking into account most of the practical conditions. The comprehensive analyses performed in this study confirmed the important requirements for effective transduction of the stress induced in a receptor layer through the interfacial structures, including partial and full attachments. Notably, the results indicate that some partially attached interfacial structures can even enhance the deflection of a cantilever.

Rights:

• Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
  

Keyword: nanomechanical sensors, finite element analysis

Date published: 2021-01-08

Publisher: Elsevier BV

Journal:

• SENSORS AND ACTUATORS A-PHYSICAL (ISSN: 09244247) vol. 319 p. 112533-112533

Funding:

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4222

First published URL: https://doi.org/10.1016/j.sna.2020.112533

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Updated at: 2024-01-05 22:11:09 +0900

Published on MDR: 2023-07-25 13:55:23 +0900