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In nanomechanical sensing, the interfacial structure between a receptor layer and an underlying substrate affects output signals, especially in the case of a partial attachment at the interface. Here, we present numerical simulations of the interfacial structures for the static deflection of a nanomechanical cantilever sensor by finite element analysis. A wide range of physical and structural parameters of receptor layers as well as interfacial structures are analyzed, while taking into account most of the practical conditions. The comprehensive analyses performed in this study confirmed the important requirements for effective transduction of the stress induced in a receptor layer through the interfacial structures, including partial and full attachments. Notably, the results indicate that some partially attached interfacial structures can even enhance the deflection of a cantilever.

権利情報:

• Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
  

キーワード: nanomechanical sensors, finite element analysis

刊行年月日: 2021-01-08

出版者: Elsevier BV

掲載誌:

• SENSORS AND ACTUATORS A-PHYSICAL (ISSN: 09244247) vol. 319 p. 112533-112533

研究助成金:

原稿種別: 著者最終稿 (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4222

公開URL: https://doi.org/10.1016/j.sna.2020.112533

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更新時刻: 2024-01-05 22:11:09 +0900

MDRでの公開時刻: 2023-07-25 13:55:23 +0900