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Recent Advances in Nanomechanical Membrane-Type Surface Stress Sensors towards Artificial Olfaction

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Nanomechanical sensors have gained significant attention as powerful tools for detecting, dis-tinguishing, and identifying target analytes, especially odors that are composed of a complex mixture of gaseous molecules. Nanomechanical sensors and their arrays are a promising plat-form for artificial olfaction in combination with data processing technologies, including machine learning techniques. This paper reviews the background of nanomechanical sensors, especially conventional cantilever-type sensors. Then, we focus on one of the optimized structures for static mode operation, a nanomechanical Membrane-type Surface stress Sensor (MSS), and discuss re-cent advances in MSS and their applications towards artificial olfaction.

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  • 19/09/2022
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