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InP
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Arイオンスパッタリングされた各種化合物半導体表面のSEM観察
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Type of work
Publication
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Keyword
argon ion sputtering
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compound semiconductor
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surface observation using a scanning electron microscope
1
Language
Japanese
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Publisher
Surface Analysis Society of Japan
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Article
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open
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In Copyright
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Material/Specimen
GaAs
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GaP
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GaSb
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InAs
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InP
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Author
Ogiwara, Toshiya
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Tanuma, Shigeo
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Journal
Journal of Surface Analysis
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