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topology optimization
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Topology optimization for piezoresistive nanomechanical surface stress sensors in anisotropic <111> orientations.
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anisotropic materials
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nanomechanical sensors
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piezoresistive microcantilever
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surface stress
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topology optimization
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English
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IOP Publishing
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Creative Commons BY Attribution 4.0 International
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Kosuke Minami
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Nano Express
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