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Topology optimization for piezoresistive nanomechanical surface stress sensors in anisotropic <111> orientations.
Description/Abstract:
MEMS-based piezoresistive nanomechanical sensors are compact sensing platforms widely employed in vapor sensing, environmental monitoring...
Keyword:
anisotropic materials
,
nanomechanical sensors
,
piezoresistive microcantilever
,
surface stress
, and
topology optimization
Resource Type:
Article
Author:
Kosuke Minami
Journal:
Nano Express
Date Uploaded:
04/12/2023
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1
Keyword
anisotropic materials
1
nanomechanical sensors
1
piezoresistive microcantilever
1
surface stress
[remove]
1
topology optimization
1
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English
1
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IOP Publishing
1
Resource type
Article
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open
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Rights Statement Sim
Creative Commons BY Attribution 4.0 International
1
Author
Kosuke Minami
1
Journal
Nano Express
1