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Topology optimization for piezoresistive nanomechanical surface stress sensors in anisotropic <111> orientations.

Description/Abstract:

MEMS-based piezoresistive nanomechanical sensors are compact sensing platforms widely employed in vapor sensing, environmental monitoring...

Keyword:

anisotropic materials, nanomechanical sensors, piezoresistive microcantilever, surface stress, and topology optimization

Resource Type:

Article

Author:

Kosuke Minami

Journal:

Nano Express

Date Uploaded:

04/12/2023