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Experimental formation and mechanism study for super-high dielectric constant AlOx/TiOy nanolaminates
Description/Abstract:
Super-high dielectric constant (k) AlOx/TiOy nanolaminates (ATO NLs) are deposited by an atomic layer deposition technique for applicatio...
Keyword:
ATO
,
nanolaminate
, and
super-high dielectric constant
Resource Type:
Article
Author:
Jiangwei Liu
,
Masayuki Okamura
,
Hisanori Mashiko
,
Masataka Imura
,
Meiyong Liao
,
Ryosuke Kikuchi
,
Michio Suzuka
, and
Yasuo Koide
Journal:
Nanomaterials
Date Uploaded:
05/10/2023
Date Modified:
05/10/2023
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ATO
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nanolaminate
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super-high dielectric constant
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English
1
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MDPI AG
1
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Article
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Rights Statement Sim
Creative Commons BY Attribution 4.0 International
1
Author
Hisanori Mashiko
1
Jiangwei Liu
1
Masataka Imura
1
Masayuki Okamura
1
Meiyong Liao
1
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Journal
Nanomaterials
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