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表面分析における電子の非弾性散乱

Description/Abstract:

This paper describes the recent progress in electron inelastic mean free paths (IMFPs) calculations with the dielectric response function...

Keyword:

IMFP, dielectric function model, electron inelastic mean free path, energy loss function, and modified Bethe equation

Resource Type:

Article

Author:

田沼繁夫

Journal:

Vacuum and Surface Science

Date Uploaded:

13/05/2023