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Description/Abstract:: MEMS-based piezoresistive nanomechanical sensors are compact sensing platforms widely employed in vapor sensing, environmental monitoring...
Keyword:: anisotropic materials, nanomechanical sensors, piezoresistive microcantilever, surface stress, and topology optimization
Resource Type:: Article
Author:: Kosuke Minami
Journal:: Nano Express
Date Uploaded:: 04/12/2023

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