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Filtering by: Keyword Nanofabrication Keyword Lithography Publisher National Institute for Materials Science Resource type Article

[MANA E-BULLETIN Vol.6 - Feature] Advanced nano-fabrication technology catalyzing discovery and innovation at MANA

Description/Abstract:

Facilities for lithography and nanofabrication were established at NIMS in 2004 under the leadership of Masakazu Aono, the Director the I...

Keyword:

Characterization, Film Deposition, Lithography, Namiki Foundry, and Nanofabrication

Resource Type:

Article

Author:

International Center for Materials Nanoarchitectonics (WPI-MANA) and International Center for Materials Nanoarchitectonics (WPI-MANA)

Date Uploaded:

05/01/2023

Date Modified:

19/01/2023