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Filtering by: Keyword InP/GaInAsP multilayer specimens Remove constraint Keyword: InP/GaInAsP multilayer specimens Keyword argon ion sputtering Remove constraint Keyword: argon ion sputtering Language Japanese Remove constraint Language: Japanese

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Auger Depth Profiling Analyses of InP/GaInAsP Multilayers

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Type of work

Publication1

Keyword

Auger depth profiling analysis1
InP/GaInAsP multilayer specimens[remove]1
argon ion sputtering[remove]1

Language

Japanese[remove]1

Publisher

Surface Science Society of Japan1

Resource type

Article1

Visibility

open1

Rights Statement Sim

In Copyright1

Material/Specimen

InP/GaInAsP multilayer specimens1

Author

OGIWARA, Toshiya1
TANUMA, Shigeo1

Journal

Journal of The Surface Science Society of Japan1

National Institute for Materials Science

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