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Filtering by: Keyword Gallium nitride Keyword Surface oxidation

Description/Abstract:: The surface oxidation behavior of different GaN surfaces (the polar Ga-face (+c) and the nonpolar m-plane) under H<sub>2</sub>O vapor amb...
Keyword:: GaN, Gallium nitride, MOS structure, Oxidation, SPring-8, Surface oxidation, and XPS
Resource Type:: Dataset
Data origin:: other
Author:: SUMIYA, Masatomo
Date Uploaded:: 14/02/2023
Date Modified:: 28/02/2023

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