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Effect of defects on Q factors of single-crystal diamond MEMS resonators
Description/Abstract:
A resonator with a high Q factor is generally pursued in the single-crystal diamond (SCD) microelectromechanical system (MEMS) for high-p...
Keyword:
Diamond, MEMS, Q factor
Resource Type:
Article
Author:
Zilong Zhang
,
Guo Chen
,
Keyun Gu
,
Satoshi Koizumi
, and
Meiyong Liao
Journal:
Functional diamond
Date Uploaded:
05/03/2024
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Keyword
Diamond, MEMS, Q factor
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English
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Informa UK Limited
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Creative Commons BY Attribution 4.0 International
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Guo Chen
1
Keyun Gu
1
Meiyong Liao
1
Satoshi Koizumi
1
Zilong Zhang
1
Journal
Functional diamond
1