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1. Experimental formation and mechanism study for super-high dielectric constant AlOx/TiOy nanolaminates

Description/Abstract:: Super-high dielectric constant (k) AlOx/TiOy nanolaminates (ATO NLs) are deposited by an atomic layer deposition technique for applicatio...
Keyword:: ATO, nanolaminate, and super-high dielectric constant
Resource Type:: Article
Author:: Jiangwei Liu, Masayuki Okamura, Hisanori Mashiko, Masataka Imura, Meiyong Liao, Ryosuke Kikuchi, Michio Suzuka, and Yasuo Koide
Journal:: Nanomaterials
Date Uploaded:: 05/10/2023
Date Modified:: 05/10/2023