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Description/Abstract:: 磁気ヘッド材料として用いられているFeNi:5 nm/CoFeB:3 nm/FeNi:10 nm多層薄膜の深さ方向組成分布を調べるために，極低角度入射イオンビームを用いたオージェ深さ方向分析によりイオン加速電圧0.5 kVおよび3.0 kVのスパッタ条件で分析を行った．その...
Keyword:: Auger Depth Profiling Analysis, Ultra Low Angle Incidence Ion Beam, and FeNi/CoFeB/FeNi Thin Film
Material/Specimen:: FeNi/CoFeB/FeNi Thin Film
Resource Type:: Article
Author:: Ogiwara, Toshiya, Yanagiuchi, Katsuaki, and Yoshikawa, Hideki
Journal:: Journal of Surface Analysis
Date Uploaded:: 28/05/2021
Date Modified:: 04/06/2021

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