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Rapid measurement of low-order aberrations using Fourier transforms of crystalline Ronchigrams
Description/Abstract:
The aberrations of the objective lens should be measured and adjusted to realize high spatial resolution in scanning transmission electro...
Keyword:
Aberration
,
Ronchigram
,
STEM
, and
alignment
Resource Type:
Article
Author:
Koji Kimoto
and
Kazuo Ishizuka
Journal:
Ultramicroscopy
Date Uploaded:
02/08/2022
Date Modified:
03/08/2022
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Aberration
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Ronchigram
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Elsevier BV
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Rights Statement Sim
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
1
Author
Kazuo Ishizuka
1
Koji Kimoto
1
Journal
Ultramicroscopy
1