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Filtering by: Type of work Publication Remove constraint Type of work: Publication Keyword GaAs/AlAs Superlattice Remove constraint Keyword: GaAs/AlAs Superlattice Specimen set tesim ala Remove constraint Specimen set tesim: ala

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Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder

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High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer

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Type of work

Publication[remove]2

Keyword

Auger Depth Profiling Analysis2
GaAs/AlAs Superlattice[remove]2
Inclined Holder2
Si/Ge multiple delta-doped layers2

Language

Japanese2

Publisher

Surface Analysis Society of Japan1
The Surface Science Society of Japan1

Resource type

Article2

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open2

Rights Statement Sim

In Copyright2

Material/Specimen

GaAs/AlAs Superlattice1
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers1
Si/Ge multiple delta-doped layers1

Author

Kim, Kyung Joong2
Nagatomi, Takaharu2
Ogiwara, Toshiya2
Tanuma, Shigeo2

Journal

Journal of Surface Analysis1
Journal of The Surface Science Society of Japan1

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