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Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
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XAFS spectrum of ruthenium (IV) oxide
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XAFS spectrum of ruthenium
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XAFS spectrum of rhodium (III) oxide
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XAFS spectrum of palladium (II) oxide
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XAFS spectrum of palladium
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XAFS spectrum of molybdenum
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XAFS spectrum of silver
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XAFS spectrum of zirconium
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XAFS spectrum of zirconium oxide
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