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Calculations of Electron Inelastic Mean Free Paths III. Data for 15 Inorganic compounds over the 50 - 2000 eV Range

Description/Abstract:

We report calculations of electron inelastic mean free path (IMFPs) of 50-2000 eV electrons in a group of 15 inorganic compounds (Al2O3, ...

Keyword:

IMFP, Inorganic compounds, and TPP-2

Resource Type:

Article

Author:

Tanuma, Shigeo, Powell, C. J., and Penn, D. R.

Journal:

Surface and Interface Analysis

Date Uploaded:

03/08/2023
Calculations of Electron Inelastic Mean Free Paths IV. Evaluation of calculated IMFPs and of the predictive IMFP formula TPP-2 for electron energies between 50 and 2000 eV

Description/Abstract:

We have made additional evaluations of the electron inelastic mean free paths ([MFPs) and of the predictive IMFP formula TPP-2 presented ...

Keyword:

Evaluations of TPP-2 formula, IMFP, and predictive IMFP formula TPP-2

Resource Type:

Article

Author:

Tanuma, S., Powell, C. J., and Penn, D. R.

Journal:

Surface and Interface Analysis

Date Uploaded:

07/11/2023

Date Modified:

07/11/2023