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1. Calculations of Electron Inelastic Mean Free Paths for 31 Materials

Description/Abstract:: We present new calculations of electron inelastic mean free paths (IMFPs) for 200-2000 eV electrons in 27 elements (C, Mg, Al, Si, Ti, V,...
Keyword:: Bethe equation, IMFP, TPP, elemental solids, and inelastic mean free path
Resource Type:: Article
Author:: Tanuma, S., Powell, C. J., and Penn, D. R.
Journal:: Surface and Interface Analysis
Date Uploaded:: 05/06/2023
Date Modified:: 09/06/2023