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Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering

Description/Abstract:

We have conducted Auger depth profiling analyses of InP/GaInAsP multilayer specimens, in which the surface roughness was caused by the ar...

Keyword:

Auger depth profiling analysis, InP/GaInAsP multilayer specimens, surface roughness, atomic force microscope, and depth resolution function

Material/Specimen:

InP/GaInAsP multilayer specimens

Resource Type:

Article

Author:

OGIWARA, Toshiya and TANUMA, Shigeo

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

01/10/2021

Date Modified:

01/10/2021
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers

Description/Abstract:

We have investigated the dependence of the depth resolution of Auger depth profiles of InP/GaInAsP multilayer specimens on the sputtering...

Keyword:

Auger depth profiling analysis, InP/GaInAsP multilayer specimens, and argon ion sputtering

Material/Specimen:

InP/GaInAsP multilayer specimens

Resource Type:

Article

Author:

OGIWARA, Toshiya and TANUMA, Shigeo

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

01/10/2021

Date Modified:

01/10/2021