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Filtering by: Journal Journal of The Surface Science Society of Japan Remove constraint Journal: Journal of The Surface Science Society of Japan Keyword InP/GaInAsP multilayer specimens Remove constraint Keyword: InP/GaInAsP multilayer specimens Keyword argon ion sputtering Remove constraint Keyword: argon ion sputtering Resource type Article Remove constraint Resource type: Article Rights Statement Sim In Copyright Remove constraint Rights Statement Sim: In Copyright Material/Specimen InP/GaInAsP multilayer specimens Remove constraint Material/Specimen: InP/GaInAsP multilayer specimens

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