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Filtering by: Journal Functional diamond Remove constraint Journal: Functional diamond Publisher Informa UK Limited Remove constraint Publisher: Informa UK Limited

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Effect of defects on Q factors of single-crystal diamond MEMS resonators

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Type of work

Publication1

Keyword

Diamond, MEMS, Q factor1

Language

English1

Publisher

Informa UK Limited[remove]1

Resource type

Article1

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open1

Rights Statement Sim

Creative Commons BY Attribution 4.0 International1

Author

Guo Chen1
Keyun Gu1
Meiyong Liao1
Satoshi Koizumi1
Zilong Zhang1

Journal

Functional diamond[remove]1

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