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Filtering by: Creator Shigeo Tanuma Remove constraint Creator: Shigeo Tanuma Material/Specimen GaAs/AlAs Superlattice Remove constraint Material/Specimen: GaAs/AlAs Superlattice

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High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Hol...

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Type of work

Publication1

Keyword

Auger Depth Profiling Analysis1
GaAs/AlAs Superlattice1
Inclined Holder1
Si/Ge multiple delta-doped layers1

Language

Japanese1

Publisher

Surface Analysis Society of Japan1

Resource type

Article1

Visibility

open1

Rights Statement Sim

In Copyright1

Material/Specimen

GaAs/AlAs Superlattice[remove]1
Si/Ge multiple delta-doped layers1

Author

Kim, Kyung Joong1
Nagatomi, Takaharu1
Ogiwara, Toshiya1
Tanuma, Shigeo1

Journal

Journal of Surface Analysis1

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