InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告（I）

High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer

Auger Depth Profiling Analysis of FeNi/CoFeB/FeNi Specimen Using an Ultra Low Angle Incidence Ion Beam

InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性