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Filtering by: Creator Kim, Kyung Joong Remove constraint Creator: Kim, Kyung Joong Journal Journal of The Surface Science Society of Japan Remove constraint Journal: Journal of The Surface Science Society of Japan

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Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder

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Type of work

Publication1

Keyword

Auger Depth Profiling Analysis1
GaAs/AlAs Superlattice1
Inclined Holder1
Si/Ge multiple delta-doped layers1

Language

Japanese1

Publisher

The Surface Science Society of Japan1

Resource type

Article1

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open1

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Material/Specimen

GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers1

Author

Kim, Kyung Joong1
Nagatomi, Takaharu1
Ogiwara, Toshiya1
Tanuma, Shigeo1

Journal

Journal of The Surface Science Society of Japan[remove]1

National Institute for Materials Science

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