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Hideki Yoshikawa
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English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2 /Si by the glancing angle ion beam sputtering method at an incident angle...
Keyword:
Auger Depth Profiling Analysis
,
HfO2/Si
, and
Ultra Low Angle Incidence Ion Beam
Material/Specimen:
HfO2
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Nagata, Takahiro
, and
Yoshikawa, Hideki
Journal:
Journal of Surface Analysis
Date Uploaded:
19/08/2021
Date Modified:
20/08/2021
Auger Depth Profiling Analysis of FeNi/CoFeB/FeNi Specimen Using an Ultra Low Angle Incidence Ion Beam
Description/Abstract:
磁気ヘッド材料として用いられているFeNi:5 nm/CoFeB:3 nm/FeNi:10 nm多層薄膜の深さ方向組成分布を調べるために,極低角度入射イオンビームを用いたオージェ深さ方向分析によりイオン加速電圧0.5 kVおよび3.0 kVのスパッタ条件で分析を行った.その...
Keyword:
Auger Depth Profiling Analysis
,
Ultra Low Angle Incidence Ion Beam
, and
FeNi/CoFeB/FeNi Thin Film
Material/Specimen:
FeNi/CoFeB/FeNi Thin Film
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Yanagiuchi, Katsuaki
, and
Yoshikawa, Hideki
Journal:
Journal of Surface Analysis
Date Uploaded:
28/05/2021
Date Modified:
04/06/2021
Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger Depth Profiling analysis
,
HfO2/Si
, and
Ultra Low Angle Incidence Ion Beam
Material/Specimen:
HfO2
Resource Type:
Article
Author:
Yoshikawa, Hideki
,
Ogiwara, Toshiya
, and
Nagata, Takahiro
Journal:
Journal of Surface Analysis
Date Uploaded:
25/05/2021
Date Modified:
26/05/2021
Automatic Experimental Data Collection System Using a Wireless LAN Capable SD Card as an IoT Device
Description/Abstract:
実験・計算・データ科学を融合させた材料の研究開発を推進するマテリアルズインフォマティクス(MI)が推進されているが、実験データの収集については既存データベースのインポートや出版済み論文のデータマイニングに限られる場合が多い。効果的な MI のためには各種装置から自動的に実験...
Keyword:
FlashAir
,
IoT
,
Wi-Fi
, and
data transfer
Resource Type:
Presentation
Author:
MATSUDA, Asahiko
,
YOSHIKAWA, Hideki
, and
CHIKYOW, Toyohiro
Date Uploaded:
23/10/2020
Date Modified:
01/07/2021
Calculations of Electron Inelastic Mean Free Paths. XI. Data for Liquid Water for Energies from 50 eV to 30 keV
Description/Abstract:
We calculated electron inelastic mean free paths (IMFPs) for liquid water from its optical energy-loss function (ELF) for electron energi...
Keyword:
EAL
,
Electron Inelastic Mean Free Path
,
IMFP
,
effective attenuation length
,
liquid water
,
relativistic TPP-2M
,
relativistic full Penn algorithm
, and
static structure factor
Resource Type:
Article
Author:
Shinotsuka, Hiroshi
,
Da, Bo
,
Tanuma, Shigeo
,
Yoshikawa, Hideki
,
Powell , Cedric J
, and
Penn, David R
Journal:
Surface and Interface Analysis
Date Uploaded:
31/07/2020
Date Modified:
02/07/2021
電子線マイクロアナライザーによるMg-Ge合金の定量 -Mg Kαに対するGeの質量吸収係数の検討-, Electron microprobe analysis of Mg-Ge alloy -Examination of the mass absorption coefficient of Ge for MgKα–
Description/Abstract:
電子線マイクロアナライザーは広く材料の分析に用いられ,定量分析法はZAF法としてほぼ確立されている.しかし,Mg-Ge合金においては,定量分析の結果MgとGeの濃度の合計120wt.% と異常な値を示した.しかも電子線の加速電圧が高くなるに従ってMgの定量値が上昇する.こ...
Keyword:
Mg-Ge alloy
,
ZAF
,
electron probe microanalyzer
, and
mass absorption coefficient
Resource Type:
Article
Author:
Nishio, Mitsuaki
,
Imai, Motoharu
,
Tanuma, Shigeo
,
Yoshikawa, HIdeki
, and
Isoda, Yukihiro
Journal:
Journal of Surface Analysis
Date Uploaded:
20/07/2020
Date Modified:
22/07/2020
Calculations of Mean Escape Depths of Photoelectrons in Elemental Solids Excited by Linearly Polarized X-rays for High-Energy Photoelectron Spectroscopy
Description/Abstract:
We have calculated mean escape depths (MEDs, D) of photoelectrons from Si, Cu, and Au excited by linearly polarized X-rays over the 50 to...
Keyword:
MED
,
asymmetry parameter
,
high-energy photoelectron spectroscopy
,
lnearly polarized X-rays
, and
mean escape depth
Resource Type:
Article
Author:
Tanuma, Shigeo
,
Yoshikawa, Hideki
,
Shinotsuka, Hiroshi
, and
Ueda, Ryuichi
Journal:
Journal of Electron Spectroscopy and Related Phenomena
Date Uploaded:
26/06/2020
Date Modified:
02/07/2021
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The history of DICE and NIMS Digital Library
3
Keyword
Ultra Low Angle Incidence Ion Beam
3
Auger Depth Profiling Analysis
2
HfO2/Si
2
IoT
2
X-ray photoelectron spectroscopy
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English
10
Japanese
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Surface Analysis Society of Japan
4
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American Physical Society (APS)
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15
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17
Rights Statement Sim
In Copyright
8
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
6
Creative Commons BY Attribution 4.0 International
3
Material/Specimen
HfO2
2
FeNi/CoFeB/FeNi Thin Film
1
Date accepted
2017
1
2019
1
2020
1
Date submitted
2019
1
Author
Yoshikawa, Hideki
7
Hideki Yoshikawa
5
Bo Da
4
Shigeo Tanuma
4
YOSHIKAWA, Hideki
4
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https://creativecommons.org/licenses/by-nc-nd/4.0/
3
https://creativecommons.org/licenses/by/4.0/
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JSPS KAKENHI
1
JST CREST
1
Journal
Journal of Surface Analysis
4
Journal of Electron Spectroscopy and Related Phenomena
2
情報処理学会論文誌デジタルプラクティス
2
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
1
Journal of Electron Spectroscopy and Related Phenomena
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