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Hanjun Cho
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Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway
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IGZO
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contact resistance
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hydrogen
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oxide semiconductors
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American Chemical Society (ACS)
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Creative Commons BY Attribution 4.0 International
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Hanjun Cho
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Hideo Hosono
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Junghwan Kim
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Ministry of Education, Culture, Sports, Science and Technology
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