Single-crystal diamond (SCD) is a promising material for high-performance and high-reliability micro-electromechanical system (MEMS) supe...

MEMS resonators are typically engineered to function at their first vibration mode, and extensive research has been dedicated to understa...

MEMS resonant sensing devices require both HF (f) and low dissipation or high quality factor (Q) to ensure high sensitivity and high spee...

In this paper, the development of diamond‐based MEMS/NEMS from the viewpoints of classic devices to quantum systems are reviewed. The fa...

Single-crystal diamond (SCD) microelectromechanical systems (MEMS) resonators with lower energy dissipation and higher quality (Q) factor...

Electrically integrable, high-sensitivity, and high-reliability magnetic sensors are not yet realized at high temperatures (500 °C). In t...

Diamond-based solar blind ultraviolet (UV) photodetectors (PDs) have attracted extensive attention due to their unique characteristics in...

Self-powered solar-blind UV detectors are playing an increasingly critical role in the sustainable development of photodetectors with lo...

A resonator with a high Q factor is generally pursued in the single-crystal diamond (SCD) microelectromechanical system (MEMS) for high-p...

The control of the interface states between the electric contacts and semiconductor is a key issue to develop high-performance functional...