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Yuta Itoh
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Atomic resolution analysis of extended defects and Mg agglomeration in Mg-ion-implanted GaN and their impacts on acceptor formation
Description/Abstract:
We used atomic-scale direct observations by transmission electron microscopy (TEM) and atom probe tomography to clarify the crystallograp...
Keyword:
atom probe tomography
,
gallium nitride
, and
transmission electron microscopy
Resource Type:
Article
Author:
Emi Kano
,
Keita Kataoka
,
Jun Uzuhashi
,
Kenta Chokawa
,
Hideki Sakurai
,
Akira Uedono
,
Tetsuo Narita
,
Kacper Sierakowski
,
Michal Bockowski
,
Ritsuo Otsuki
,
Koki Kobayashi
,
Yuta Itoh
,
Masahiro Nagao
,
Tadakatsu Ohkubo
,
Kazuhiro Hono
,
Jun Suda
,
Tetsu Kachi
, and
Nobuyuki Ikarashi
Journal:
JOURNAL OF APPLIED PHYSICS
Date Uploaded:
28/09/2023
Date Modified:
28/09/2023
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1
Keyword
atom probe tomography
1
gallium nitride
1
transmission electron microscopy
1
Language
English
1
Publisher
AIP Publishing
1
Resource type
Article
1
Visibility
open
1
Rights Statement Sim
Creative Commons BY Attribution 4.0 International
1
Author
Akira Uedono
1
Emi Kano
1
Hideki Sakurai
1
Jun Suda
1
Jun Uzuhashi
1
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Journal
JOURNAL OF APPLIED PHYSICS
1