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Filtering by: Author Tanuma, Shigeo Type of work Publication Keyword electron inelastic mean free path Publisher Wiley

Description/Abstract:: We report inelastic mean free paths (IMFPs) of Si3N4 and LiF for electron energies from 50 eV to 200 keV that were calculated from their ...
Keyword:: IMFP, Improved Predictive IMFP Formula, JTP equation, TPP-2M, and electron inelastic mean free path
Resource Type:: Article
Author:: Jablonski, Aleksander, Tanuma, Shigeo, and Powell, C. Cedric
Journal:: Surface and Interface Analysis
Date Uploaded:: 29/05/2023
Date Modified:: 06/06/2023

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