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Filtering by: Author Tanuma, Shigeo Remove constraint Author: Tanuma, Shigeo Author Nagatomi, Takaharu Remove constraint Author: Nagatomi, Takaharu Type of work Publication Remove constraint Type of work: Publication Resource type Article Remove constraint Resource type: Article Material/Specimen Si/Ge multiple delta-doped layers Remove constraint Material/Specimen: Si/Ge multiple delta-doped layers

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