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Filtering by: Author Tanuma, Shigeo Author Jablonski, Aleksander Type of work Publication

Calculations of Electron Inelastic Mean Free Paths (IMFPs). XIV. Calculated IMFPs for LiF and Si3N4 and Development of an Improved Predictive IMFP Formula

Description/Abstract:

We report inelastic mean free paths (IMFPs) of Si3N4 and LiF for electron energies from 50 eV to 200 keV that were calculated from their ...

Keyword:

IMFP, Improved Predictive IMFP Formula, JTP equation, TPP-2M, and electron inelastic mean free path

Resource Type:

Article

Author:

Jablonski, Aleksander, Tanuma, Shigeo, and Powell, C. Cedric

Journal:

Surface and Interface Analysis

Date Uploaded:

29/05/2023

Date Modified:

06/06/2023