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TANUMA, Shigeo
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surface roughness
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Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
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Auger depth profiling analysis
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InP/GaInAsP multilayer specimens
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atomic force microscope
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depth resolution function
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surface roughness
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Japanese
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Surface Science Society of Japan
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InP/GaInAsP multilayer specimens
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OGIWARA, Toshiya
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TANUMA, Shigeo
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Journal of The Surface Science Society of Japan
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